Manufacturing Ammonium Bifluoride Products By Utilizing BOE waste liquid, Generated By Chip Manufacturers.

Manufacturing ammonium bifluoride products using waste liquid generated by Buffered Oxide Etch(BOE) processes in chip plants.

In the process of chip production, a waste liquid that contains fluorine (also known as "BOE waste liquid") is typically discharged.

The components of this waste liquid are listed in the table below.

The production of ammonium bifluoride involves utilizing BOE waste liquid and hydrofluoric acid as raw materials.

Flow Chart:


The production process of ammonium bifluoride using BOE waste liquid and hydrofluoric acid involves the following steps:

  1. BOE is transferred from the storage tank to the intermediate homogenization tank.
  2. Homogenized BOE is then pumped into an ammonium bifluoride reactor kettle, where it reacts with hydrofluoric acid under controlled pH conditions. The resulting dilute ammonium bifluoride solution is then produced.
  3. The dilute ammonium bifluoride solution is fed into a multi-effect evaporator and concentrated through external steam into a concentrated ammonium bifluoride solution. The evaporated steam becomes wastewater and is treated at the sewage treatment station.
  4. The concentrated ammonium bifluoride solution is then sent to an aging kettle to age and stabilize the solution.
  5. The solution is cooled and crystallized to obtain a mixed solution that is further centrifuged to obtain wet ammonium bifluoride. The mother liquor is recycled to the concentration process.
  6. Wet ammonium bifluoride products are dried in an airflow dryer to obtain finished products, which are then packaged and stored in the finished product silo.
  7. The tail gas from each process is treated in the tail gas absorption system and discharged after undergoing two-stage water absorption, one-stage acid absorption, and one-stage alkali absorption.
  8. The tail gas generated by each process enters a tail gas absorption system, where it undergoes a series of treatments to meet the required discharge standards. This involves two-stage water absorption, one-stage acid absorption, and one-stage alkali absorption. After undergoing these treatments, the tail gas can be safely discharged.

This production process of ammonium bifluoride from industrial waste boasts the following features:

  1. It aligns with the circular economy concept of producing industrial products from waste materials, making it a sustainable and eco-friendly process.
  2. The technology used is at the international advanced level, and the process is clean and environmentally friendly.
  3. The production device is designed to be continuous, closed, energy-saving, efficient, and pollution-free.
  4. The product quality meets the standard of superior products, and the ammonium bifluoride does not agglomerate even after storage for one year.
  5. The whole system operates under negative pressure, and the liquid raw material pipeline is double-cased, with a pump valve box and automatic liquid leakage alarm structures that ensure production safety.
  6. The process is fully automated and unmanned on-site, utilizing advanced DCS control and high-definition video monitoring systems for production control.