Manufacturing Electronic-Grade Hydrofluoric Acid Products Utilizing Normal Hydrogen Fluoride.

Introduction of technology for producing electronic grade hydrofluoric acid products of hydrogen fluoride (UPSS or ppt grade)

Electronic hydrofluoric acid (high-purity hydrofluoric acid) is a strong acid cleaning and corrosive agent, which can be used with nitric acid, glacial acetic acid, hydrogen peroxide and ammonium hydroxide. It is mainly used for cleaning and corrosion of integrated circuits (IC) and vlsi chips, and is a key basic chemical material in the manufacturing process of the microelectronics industry. Electronic hydrofluoric acid can also be used as an analytical reagent and to prepare high-purity fluorine-containing chemicals.

It can be divided into according to the product use: photovoltaic (EL), LCD panel (UP, UP-S) and integrated circuit (UP-SS). The quality specifications and requirements of the three products are increasing in turn. UP-SS electronic hydrofluoric acid is a high-grade etchant and cleaning agent with difficult production technology and high quality requirements (the content of various ions ≤0.1ppb). It is one of the necessary raw materials for the new generation of electronic products representing the highest specification and standard of electronic-grade hydrofluoric acid.

Industrial-grade AHF is used as raw material to produce electronic-grade hydrofluoric acid products.

Flow Chart:

Anhydrous hydrofluoric acid is first pretreated physically and chemically, then oxidized to remove arsenic and tellurium, and boron is removed by fluorine and nitrogen. And then pumped into the high-level tank.

After entering a multistage rectification tower, rectify to obtain high-purity hydrogen fluoride gas, and enter an absorption tower. The residual liquid of the rectification tower is regularly discharged to the industrial hydrofluoric acid production system or returned to the anhydrous hydrogen fluoride production system.

Metered ultrapure water is introduced in the absorption tower to absorb high-purity hydrogen fluoride gas into the high-purity hydrofluoric acid crude product.

The crude hydrofluoric acid is subjected to ultra-clean filtration to remove possible particles, and then enters the storage tank for homogenization treatment.

Finally, packaging in a purification room to obtain high-purity electronic grade hydrofluoric acid products.

The HF content of electronic hydrofluoric acid can be modulated independently in the range of 25% ~ 55%. Hence, products with different contents can be produced according to customers' needs.